Abstract
Nanoparticle slurries are widely used in semiconductor CMP processing. Accurately evaluating quality attributes of CMP slurries can be challenging for standard optical methods. Ceria slurries can be too optically dense and inhomogeneous for most optical measurements. Diluting the slurry can induce agglomeration or break up the agglomerates already present in the slurry. Previous studies of silica CMP slurries demonstrated that Total Holographic Characterization (THC) is effective for monitoring agglomeration in slurries. THC uses particle holograms to determine particle size and composition. Ceria nanoparticles have higher refractive indexes than silica nanoparticles, and produce more scattered light, which can reduce the signal of measurements of agglomerates, making accurate, reproducible measurements more challenging. Ceria slurry was successfully analyzed at concentrations typically used in semiconductor processing. Effective-medium theory is used to understand the variation in refractive index of large particle contaminants as compared to native slurry nanoparticles and other contaminants such as pad debris.
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