Total electron scattering cross sections ofPH3andSiH4molecules in the energy range 90–3500 eV

Abstract

Total electron scattering cross sections of ${\mathrm{PH}}_{3}$ and ${\mathrm{SiH}}_{4}$ molecules have been obtained for 90--3500-eV electrons by measuring the attenuation of the electron beam through a gas cell. The present cross sections are compared to existing experimental cross sections as well as to theoretical predictions. No previous experimental electron scattering cross sections of ${\mathrm{PH}}_{3}$ are reported in the literature.