Total electron scattering cross sections of molecules containing H, C, N, O and F in the energy range 0.2–6.0 keV

Abstract

Based on the effective atomic total electron scattering cross sections (EATCS) of atoms in a molecular environment, a simple model is proposed to predict the total electron scattering cross sections (TCS) of H, C, N, O, and F containing molecules. The EATCS for these five atoms are reported for 0.2–6.0keV energies. The predicted TCS by this model are compared with experimental TCS in the literature. The experimental TCS of CHF3, C2F4, C2F2H2, C4F6, and c-C4F8 have been obtained for 0.2–4.5keV electrons by measuring the attenuation of the electron beam through a gas cell.