Abstract

The total electron scattering cross sections of CF 4 and C 2F 6 have been obtained for 100–1500 eV energy electrons by measuring the attenuation of the electron beam through a gas cell. These cross sections are compared to existing experimental and theoretical cross sections of these molecules. A comparison of the cross section ratio C 2F 6/CF 4 with the cross section ratio C 2H 6/CH 4 indicates a strong correlation between the cross sections and the number of electrons in these molecules.

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