Abstract
Total electron scattering cross sections for CF 4 , C 2 F 6 and C 3 F 8 have been measured in the energy range between 1.25 eV and 3000 eV using a compact linear transmission apparatus. Electrons scattered into a narrow forward angular range that should be counted in the scattered one were estimated utilizing measured quantities. The present results for CF 4 agree well with available data at low and high energies, while some discrepancies were seen at intermediate energies. Measured results for C 2 F 6 and C 3 F 8 were shown at high energies for the first time. Upper bound of the elastic cross sections for these molecules were estimated at electron energies higher than 20 eV.
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