Total displacement functions for SiC

Abstract

Numerical solutions for the displacement functions in SiC are determined from the coupled integro-differential equations governing the total number of type- j atoms displaced in the collision cascade initiated by a primary knock-on atom (PKA) of type- i and energy E. Atomic scattering cross sections based on either the inverse power law screening potentials or the Ziegler, Biersack, and Littmark (ZBL) universal screening potential are used in the calculation of the displacement functions. The electronic stopping powers used in the calculations are either derived from the LSS and Bethe-Bloch theories or generated from the SRIM-96 electronic stopping power data base. The displacement functions determined using LSS/Bethe-Bloch electronic stopping powers are 25 to 100% larger than the displacement functions determined using the electronic stopping powers generated by SRIM-96. The total number of displaced atoms determined numerically for each PKA type, based on ZBL scattering cross sections and SRIM-96 electronic stopping powers, is in excellent agreement, over the entire range of PKA energies (10 eV to 10 MeV), with the total number of displacements determined by full cascade Monte Carlo simulations using the TRIM code in SRIM-96.