Abstract
As six-axis force sensor (6-AFS) based on double layer E-type membrane takes a monolithic structure, it will inevitable generate coupling outputs when it is under the condition of dynamic loads. By means of the fundamental theory of mechanical vibration and elastic mechanics, this paper establishes an accurate mechanical model and successfully works out the dynamic outputs of torsional vibration of E-type membrane. It provides a theoretical basis for dynamic decoupling and structure optimization of 6-AFS.
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