Torsion angle measurement for a silicon based non-silicon optical micro-mirror

Abstract

A micro-mirror is the key structure of a MEMS optical switch or variable optical attenuator. The torsion angle is an essential parameter of micro-mirror. In this paper, the torsion angle of a silicon based non-silicon optical micro-mirror is measured by using hybrid optical and digital image processing technology. The result shows that the measurement scheme works well and the micro-mirror will rotate more than 15 degrees while the driving voltage is 15 V.