Abstract
Piezoresistive materials are those whose electrical resistivity changes in response to changes in mechanical strain. Piezoresistive sensors, usually consisting of a piezoresistive device working in concert with a flexible structure, are widely used in a variety of sensors such as pressure sensors and accelerometers. This paper describes a newly developed topology optimization method for the design of the flexible structures used in piezoresistive sensors. First, the design specifications for obtaining sufficient output voltage in a Wheatstone bridge connected with a piezoresistive device, and the structural stiffness requirements are clarified, and the objective functions satisfying the required specifications are formulated. A multi-objective optimization problem is also formulated for use in finding an optimal structure that incorporates all the design specifications. An optimization algorithm is constructed based on the SIMP (Solid Isotropic Material with Penalization) method and SLP (Sequential Linear Programming). Finally, several examples are presented in order to confirm the usefulness of the proposed method for the design of piezoresistive sensors.
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