Topography in secondary ion mass spectroscopy images

Abstract

Interpretation of time-of-flight secondary ion mass spectroscopy (TOF-SIMS) images from rough samples such as particles, fibers, or biological specimens can be problematic because the images are influenced not only by the sample chemistry but also by topographical features. In this article we have investigated the influence of spherical and cylindrical features on total ion yields, relative ion yields, and feature shape. TOF-SIMS images of Pluronic coated fibers and polystyrene spheres were collected using both triple focusing time and reflectron geometry instruments and a 25keV Ga+ primary ion source. The fibers and spheres were analyzed on both conducting and insulating substrates to assess the importance of field effects. Trends in the images have been explored using principal components analysis and Poisson and multinomial mixture models. The T2 test was employed to assess the statistical significance of results. The results identify three important topographic effects. The size and shape of features can be distorted as a result of the incidence angle of the primary ion beam. Additionally, both the absolute and relative intensities of ion peaks vary as a result of topography. In regions where the primary ion beam impacted the sample at a glancing angle, the relative intensity of molecular fragments characteristic of the Pluronic surfactant was up to three times higher than in regions where the beam impacted the sample at a normal angle. Comparison of results from conducting and insulating samples suggests that changes in the relative ion yields resulted primarily from differences in the incidence angle of the primary ion beam while changes in the total ion yield are influenced by both the incidence angle and distortion of the electric field by the particle. This study documents that topographic features can influence not only the absolute intensity of ion peaks but can also alter peak ratios in a statistically significant manner. In this light, a greater degree of caution is recommended when interpreting TOF-SIMS images from topographically complex samples.