Abstract
In this work, we describe the top-down fabrication of ordered mesoscopic, submicron Pb(Zr,Ti)O3 (PZT) dot arrays by means of natural lithography. A monolayer of a well-ordered hexagonal array of latex spheres with a diameter of less than 1 μm was deposited onto the PZT thin film. To adjust a desired sphere size in the range between 300 and 800 nm, the latex sphere monolayer was treated by low-pressure plasma etching in an argon-oxygen atmosphere at low RF power. Afterwards, the remaining template serves as a mask for PZT ion beam etching.
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