Abstract
Summary This paper deals with a polishing method of free formed surface. First, the effect of tool oscillation on the characteristics of curved surface polishing is discussed, and then, a polishing method to optimize the tilt angle of curved surface is described. The surface quality polished by a polishing head with tool oscillation is superior to that by a polishing head without tool oscillation, because tool contact area become wider when the tool is oscillated at low speed. The tilt angle of curved surface can be detected m polishing process using the oscillated polishing head, and the curved surface is thus kept horizontal at every polishing point by controlling a tilting table. Consequently, the free formed surface such as moulding die and the aspheric surface of optical element can be easily polished, and scratch free polishing surface and the same polishing removal rate can be obtained at every polishing point.
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