Abstract
This paper subjects an optoelectronic multi-degree-of-freedom (DOF) measurement system to establish the optical system model. Through the optical model, the multi-DOF motion can be carried out by the laser spot variation. The multi-DOF measurement system includes 2 digital image sensors and 4 laser diodes. It improves the disadvantage of conventional multi-DOF measurement system. The conventional multi-DOF measurement system usually needs many position sensing detectors (PSD) and each PSD must have enough space. Therefore, the conventional multi-DOF measurement system needs large space. Because one image sensor can sense multi laser spot simultaneously, the structure of proposed multi-DOF measurement system can be simplified.
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