Abstract
Tunnel magnetoresistance (TMR), recognized for its high sensitivity and low power consumption, holds significant promise in the domain of weak magnetic field detection. Using superconducting materials as magnetic concentrators can achieve several hundred to even a thousandfold amplification of magnetic fields, making it one of the most effective approaches to enhance the magnetic field resolution of TMR sensors. This paper utilized the flip-chip bonding process to integrate TMR with the high-temperature superconductor YBCO (YBa2Cu3O7-δ), and successfully developed TMR-YBCO composite magnetic sensor. Building upon this foundation, through optimization of the fabrication process and the pioneering use of a structural design incorporating the filling of annular holes with superconducting concentrators, the sensitivity of the sensor was further enhanced. Finally, the magnetic field resolution was increased by 1030 times compared to TMR sensors, reached to 2.9pT/Hz1/2 at 1 Hz. Simultaneously, results from frequency band testing indicated excellent frequency band characteristics, with a frequency response range exceeding kHz.
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