Abstract
Titanium nitride films were produced by dynamic mixing method on four kinds of substrates whose crystal structures differed. By the X-ray diffraction it was observed that the four films had the same preferred orientation. Cross-sectional observation with a transmission electron microscope revealed that an amorphous intermixed layer had formed. The profile of crystal growth on the intermixed layer clearly indicated that the growth started from isotropically oriented small grains and progressed gradually to preferentially oriented columnar grains.
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