Abstract

Titanium dioxide (TiO2) thin films deposited on quartz substrate by spin-coating method using titanium (IV) butoxide has been studied. The aim of this paper is to investigate the effect of annealing in oxygen ambient on the morphology and optical properties of thin films. The distinct variations in the morphology of the thin films were observed from atomic force microscope (AFM) images. The transmission spectra obtained from UV-VIS-NIR showed the TiO2thin films exhibited average transmittance value up to 80% in the visible region. Raman spectra of thin films annealed in O2shifted from 142 cm-1to 179 cm-1.

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