Abstract
Amorphous titanium dioxide (TiO2) and gold (Au) doped TiO2‐based surface acoustic wave (SAW) sensors have been investigated as hydrogen gas detectors. The nanocrystal‐doped TiO2 films were synthesized through a sol‐gel route, mixing a Ti‐butoxide‐based solution with diluted colloidal gold nanoparticles. The films were deposited via spin coating onto 64∘ YX LiNbO3 SAW transducers in a helium atmosphere. The SAW gas sensors were operated at various temperatures between 150 and 310∘C. It was found that gold doping on TiO2 increased the device sensitivity and reduced the optimum operating temperature.
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