Abstract
In this study, TiO2 nanoparticle suspensions are guided by templated molds to fabricate micrometer feature patterns and arrays. The effects of PEG with different molecular weights on suspension flowability and surface wettability between the PDMS molds and the TiO2 suspensions on pattern formation are investigated. PEG 400 is the most desirable dispersant. The suspensions have the best wetting on the mold surface with 3 wt% TX‐100 addition. Micrometer feature arrays with feature sizes ranging from 750 nm to 1.5 μm are obtained. Fundamental understanding, regarding suspension flowability, wetting, and the ability to make different feature sizes and shapes, is discussed.
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