Abstract
As one of the most widely used nanofabrication methods, the atomic force microscopy (AFM) tip-based nanomachining technique offers important advantages, including nanoscale manipulation accuracy, low maintenance cost, and flexible experimental operation. This technique has been applied to one-, two-, and even three-dimensional nanomachining patterns on thin films made of polymers, metals, and two-dimensional materials. These structures are widely used in the fields of nanooptics, nanoelectronics, data storage, super lubrication, and so forth. Moreover, they are believed to have a wide application in other fields, and their possible industrialization may be realized in the future. In this work, the current state of the research into the use of the AFM tip-based nanomachining method in thin-film machining is presented. First, the state of the structures machined on thin films is reviewed according to the type of thin-film materials (i.e., polymers, metals, and two-dimensional materials). Second, the related applications of tip-based nanomachining to film machining are presented. Finally, the current situation of this area and its potential development direction are discussed. This review is expected to enrich the understanding of the research status of the use of the tip-based nanomachining method in thin-film machining and ultimately broaden its application.
Highlights
Nanostructures have shown an increasing potential in the field of nanooptics [1], nanoelectronics [2], and nanofluidics [3]
The heat field was introduced to Conversion of graphene oxide (GO) to rGO drive the occurrence of chemical Conversion of graphene fluoride (GF) to reduced graphene fluoride (rGF) reactions on the surface of 2DMs et al conducted a cutting experiment on monolayer graphene using an Atomic force microscopy (AFM) diamond tip with scan angles of 60° and 90° to investigate the relationship between the cutting force and the lattice orientations of graphene
The electrical properties on the rGO surface were characterized by conductive AFM and Kelvin probe force microscopy (KPFM), and the results proved the reduction of the insulating GO to conductive rGO
Summary
Nanostructures have shown an increasing potential in the field of nanooptics [1], nanoelectronics [2], and nanofluidics [3] Methods such as ion-beam lithography [4], electronbeam lithography [5], and nanoindentation lithography [1] have been used to fabricate nanostructures. Much effort is needed to realize the industrialization of 2DMs. In the present work, the current status of the application of the TBN method to machine on thin-film materials is reviewed. The thin-film materials include polymers, metal and metal-based thin films, and 2DMs. Nanostructures fabricated on films by using heated AFM tip-based thermomechanical lithography are presented. At the end of the article, a summary of the current study and possible future directions are discussed
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
