Abstract
In this paper, the impact of the tip radius on dopant profiling by scanning microwave microscopy is investigated. The cantilevers are very likely to erode in such measurements, and thus, a two-dimensional Poisson solver was used to calculate the lateral spatial resolution as a function of tip radius and doping. Moreover, a strong correlation between the slope of the calibration curves and the tip diameter was found. The slope of the calibration curves increases toward −0.5 and saturates as the radius approaches values of 150 nm, which is in agreement with experimental data obtained from scanning microwave microscopy.
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