Abstract
In this paper, a low surface roughness and highly homogenous TiO2 layer was deposited by Atomic Layer Deposition (ALD) and used as an evanescent waveguide for biomedical sensing applications. Anastomosis is an operation to continue an organ like colon, bowel, pancreas etc. If there is leakage in during an anastomosis surgery (often indicated by a high bacteria concentration), it probably will cause some problems to the patients. The diagnostic of the leakage must be done soon to avoid multi complications and mortality. The research aims at developing optical sensor to detect the leakage by bacteria concentration detection in the drain fluid. In this present paper, we will report preliminary results of our research such as the simulation, fabrication and optical measurement of TiO2 optical waveguide. Freestanding structure is introduced to enhance sensitivity of such a sensor. Low stress SiN is deposited using LPCVD as interlayer material and etching stop-layer in between the Si substrate and the TiO2 waveguide. To estimate the optimum SiN thickness especially in the freestanding region, simulation was done by effective index method (EIM). Propagation and coupling losses measurement were conducted using the cut-back technique.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.