Abstract
TiO 2 thin films have been widely used in corrosion protection, solar cells, self-cleaning surfaces, photocatalysis, capacitors, etc. In this research, TiO 2 thin films were deposited on metal substrates (stainless steel, Cu alloy, Al alloy) and polymer substrates (PET, PMMA) by nano-particle deposition system (NPDS) at room temperature and low vacuum condition. Submicron size TiO 2 powders were sprayed through the supersonic nozzle and deposited at high deposition rate without thermal damage on the substrates. Material properties such as hardness, modulus, chemical composition, adhesion and morphology were measured. The test results showed that the NPDS provides a good coating method of TiO 2 material for applications requiring large surface areas.
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