Abstract
TiN protective coating was prepared on NdFeB by DC magnetron sputtering to improve the corrosion resistance and scratch resistance of the magnetic. During deposition, the nitrogen/argon mixture gas was introduced into the chamber with the nitrogen partial pressure at 20 % and 10 % and the bias of 200 V was applied to subtract, respectively. At a lower nitrogen partial pressure of 10%, TiN coating was composed of many particles with an irregular shape. With increasing the nitrogen pressure to 20%, composing particles become small and show as the regular trihedron shape. All TiN coatings have a cubic structure. The bias makes the depositing TiN coating denser and preferential growth become no obvious. By the nitrogen partial pressure of 20 % and bias of 200 V, the dense TiN coating has best corrosion resistance and excellent wear resistance.
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