Tin oxide transparent conductive films prepared by a 30kHz glow discharge of SnCl 4 and O 2

Abstract

SnO 2 transparent conductive coatings have been prepared by a 30 kHz glow discharge of SnCl 4 and O 2. The deposited films formed a rutile (tetragonal) SnO 2 crystalline structure. The average optical transmission with reference to air is about 80%, and is almost independent from the substrate deposition temperature. The lowest sheet resistance measured was 18 Ω/□, which could be associated with chlorine, from the starting material, incorporated as a donor impurity in the film. Tin oxide films prepared at substrate temperatures ⩾200 ° C , show that the sheet resistance increases up to 18% when they are baked in air at 400°C for 24 h.