Abstract
Since the invention of the Taguchi tin oxide gas sensor [l], numerous papers [2-4] have been published regarding the compositions, fabrications, catalysts, additives, mechanisms and selectivity of semiconductortype solid-state gas sensors, which can be classified according to the methods of fabrication into the following types: sintered bulk type [l], thick-film type [5], and thin-film type [6,7]. Commercial products nowadays are mostly the sintered bulk and thick-film types. The ditliculties in making the sintered bulk-type sensors arise from the contradictory effects of treatments between achieving strong mechanical strength and retaining a sufficient surface area. Thick-film-type sensors have more or less the same problems, except that the availability of IC techniques helps in mass production. Thin-tilm techniques provide many possibilities for future generations of sensor development; however, at present thin&t sensors are not fully commercialized. The metallo-organic decomposition (MOD) method [8, 91 for the deposition of metal oxide thick tihn is easy to apply and inexpensive. In this paper investigations of a sensor fabricated by the MOD and thick-film methods are reported. Further application-related testing results were reported elsewhere [lo]. /
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