Abstract
Material and tribological properties of reactively sputtered tin oxide films were determined as a function of deposition conditions. Increased substrate deposition temperature is shown to improve hardness and to lower wear rate. An oxygen partial pressure of around 0.01 Pa yields maximum hardness and minimum stress and wear rate. Films prepared at these partial pressures and at 150 degrees C are stoichiometric and crystalline. Thin-film magnetic recording media with lubricated tin oxide overcoats have low static friction and good start/stop features. >
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