Abstract
Thin tin dioxide films were prepared by large-area pulsed laser deposition, a ceramic target in oxygen atmosphere was used. The layers were structured on interdigitated electrode substrates using a two-side trenched silicon shadow mask. The influence of the oxygen background pressure during deposition on the electrical and morphological properties was investigated using four-point probe measurements, scanning electron microscopy, X-ray diffraction, and X-ray photo spectroscopy investigations. Pd was introduced into the films by DC magnetron sputtering. It was found that the resistive response to CO is increased for the Pd-doped samples. Cross-sensitivity to the oxidizing gas NO2 was investigated and the sensor showed high signals for this gas at lower temperatures.
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