Abstract
Abstract
Highlights
In previous work, it was demonstrated that the formation of stannane (SnH4), and, as a result, the successful etching of tin (Sn) from a metallic surface could be predicted by the electronegativity (χ) difference between the surface material and tin.[1]
Subsequent X-ray photoelectron spectroscopy (XPS) measurements showed that the ratio of O to Sc did not change in that time
We have shown that tin can be fully etched from a metallic Sc surface as predicted by Pachecka et al.,[1] as well from Sc thin films with complete and incomplete oxidation
Summary
It was demonstrated that the formation of stannane (SnH4), and, as a result, the successful etching of tin (Sn) from a metallic surface could be predicted by the electronegativity (χ) difference between the surface material and tin.[1]. Metals with high electronegativities form weak oxides, while those with low electronegativity form strong oxides (e.g., scandium and aluminium), leaving open the question of the role of oxidation in tin adhesion. In many conditions a metallic surface is oxidized, this is not universally true. The native oxide layer can be removed by hydrogen reactive species, changing the surface properties.[2] in many applications, such as extreme ultraviolet lithography (EUVL), space applications, and ultra-high vacuum (UHV) science, the environmental conditions may be sufficiently reducing, removing, at least temporarily, the surface oxide, and exposing the bare metal to surface processes.[2,3]
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