Abstract
We generated SnO2 alignment films with one of two liquid crystal (LC) molecular orientations: a stable, vertical orientation or a homogeneous orientation. We changed the molecular orientations by altering the growth temperature of radio-frequency (RF) magnetron sputtering. An ion-beam (IB) advanced system was used to achieve uniform alignment. We obtained two LC molecular orientations as demonstrated by the shift of the Sn 3d peaks and the altered-sub peaks of Sn2+, Sn4+ intensity on X-ray photoelectron spectroscopy (XPS) images of the various films. The electro-optical (EO) characteristics of the TN-LC and VA-LC displays on the high-k SnO2/HfO2 double films were measured; a reduction in threshold voltage, response time, and low power consumption were observed.
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