Abstract
We have developed a prototype time-of-flight neutral gas mass spectrometer that simultaneously measures the density and the velocity distribution function of each mass species, using the time-of-flight and the two-dimensional spatial distribution of the ionized particles on a charge-coupled device (CCD). We confirmed the feasibility of the velocity distribution measurement in a vacuum chamber using room-temperature Ar gas, by measuring the spatial distribution of the ionized Ar on the CCD and inferring the corresponding velocity distribution of the incident Ar.
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