Time saving technique for studying thermal processes in magnetron sputtering of titanium target

Abstract

The kinetics of thermal processes on a substrate during magnetron sputtering of a titanium target has been studied. A technique is proposed for reducing the time of the substrate heating temperature measurement, which is useful in performing extensive experiments in multifactorial problems. The selection criterion for the duration of the observation interval can be the relative error in extrapolating the stationary temperature of the substrate. The technique is universal in nature and allows to reduce the time of a single experiment by a factor of 2 - 3 with an error of no more than 5%.