Abstract
AbstractThe sputter-erosion of hcp Co (0001) single crystal with Ar+ ions in the 100 to 700 eV energy range was investigated using in-situ time-resolved x-ray scattering. At temperatures above 300°C the surface remains relatively smooth, erosion evolving through a layer-by-layer or step flow mechanism. In this regime the ions have a smoothening effect on the surface and the resulting roughness decreases with increasing ion energy. Below 300°C the surface develops a pattern of mounds or pits with a characteristic wavelength. The time, ion energy and temperature dependence of this wavelength were studied in detail. Epitaxial Co thin films thermally evaporated on sapphire were also sputtered through in order to synthesize self-assembled arrays of Co nanoclusters with a narrow size distribution. The degree of local order within the Co dot arrays was examined using atomic force microscopy.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
