Time-resolved measurement of emission profiles in pulsed radiofrequency glow discharge optical emission spectroscopy: Investigation of the pre-peak

Abstract

Radiofrequency glow discharge coupled to optical emission spectroscopy has been used in pulsed mode in order to perform a detailed study of the measured temporal emission profiles for a wide range of copper transitions. Special attention has been paid to the early emission peak (or so-called pre-peak), observed at the beginning of the emission pulse profile. The effects of the important pulse parameters such as frequency, duty cycle, pulse width and power-off time, have been studied upon the Cu pulse emission profiles. The influence of discharge parameters, such as pressure and power, was studied as well. Results have shown that the intensity observed in the pre-peak can be 10 times as large as the plateau value for resonant lines and up to 5 times in case of transitions to the metastable levels. Increasing pressure or power increased the pre-peak intensity while its appearance in time changed. The pre-peak decreased when the discharge off-time was shorter than 100 μs. According to such results, the presence of the pre-peak could be probably due to the lack of self-absorption during the first 50 μs, and not to the ignition of the plasma. Under the selected operation conditions, the use of the pre-peak emission as analytical signals increases the linearity of calibration curves for resonant lines subjected to self-absorption at high concentrations.