Time-resolved detection of propagating Lamb waves in thin silicon membranes with frequencies up to 197 GHz

Abstract

Guided acoustic waves are generated in nanopatterned silicon membranes with aluminum gratings by optical excitation with a femtosecond laser. The spatial modulation of the photoacoustic excitation leads to Lamb waves with wavelengths determined by the grating period. The excited Lamb waves are optically detected for different grating periods and at distances up to several μm between pump and probe spot. The measured frequencies are compared to the theoretical dispersion relation for Lamb waves in thin silicon membranes. Compared to surface acoustic waves in bulk silicon twice higher frequencies for Lamb waves (197 GHz with a 100 nm grating) are generated in a membrane at equal grating periods.