Abstract
The erosion properties of nitrocellulose (C 6H 7N 3O 11) thin films on Si have been studied under exposure to 270 keV H, He, C, and Ar ions. Time-of-flight elastic recoil spectrometry has been applied to determine the atomic composition of the films as a function of deposited charge. All exposed films exhibit an initial removal of N and O consistent with RONO 2 bond breaking, proceeding at a rate that appears to depend on the density of electronic excitation. A non-volatile, carbon-rich residue remains after prolonged exposure to H, He, and C ions, while the film is effectively removed under Ar irradiation. Experimental evidence supports the proposition that binary collisions are an important mechanism affecting desorption of the H and C components. The results are consistent with a suggestion that complete volatilization of the film is determined by the nuclear stopping power of the incident ion.
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