Abstract

Laser-excited surface acoustic wave (LSAW) techniques can realize the measurement of surface properties through dispersion curve inversion. In addition to the conventional phase spectrum method, time-frequency analysis can also be used as a calculation tool for the dispersion curve. An accurate time-frequency analysis method is important in precisely inverting the surface properties. In this paper, synchrosqueezing transform (SST) is applied to the analysis of LSAW. By comparing the processing results of the constructed LSAW signal, SST shows higher time-frequency resolution and robustness than other common time-frequency analysis algorithms. Finite element model is used to simulate the propagation of LSAW in the film/substrate structure. And SST is used to calculate the dispersion curve of SAW information extracted during the simulation. A fast algorithm is introduced, where the film thickness is initially estimated by calculating the midrange. Through inversion, the resulting film thickness error is only 1.20% from the theoretical value. Therefore, SST is an effective tool for analyzing LSAW and calculating its dispersion curve.

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