Time evolution of ion energy distributions and optical emissions in pulsed radio frequency plasmas

Abstract

Summary form only given. Pulsed inductively coupled plasmas have recently received considerable attention because of their possible advantages over continuous plasma discharges in industrial applications. We report the results of time-resolved measurements of ion energy distributions, relative ion densities, as well as optical emissions and electrical characteristics in such plasmas for the simple gas mixture of argon and oxygen (50% Ar/50% O/sub 2/). Comparisons with pure argon are also presented. An inductively coupled version of the Gaseous Electronics Conference RF reference cell is used to produce the pulsed plasmas and the ions are sampled though a 10 /spl mu/m diameter hole in the center of a grounded plate electrode. Ions exiting through the hole are characterized with a 45/spl deg/ electrostatic energy analyzer connected in series with a quadrupole mass spectrometer. Optical emission measurements have been made at several different wavelengths to monitor the time evolution of excited species of argon and oxygen.