Abstract
An ion-ion plasma, situated between two parallel electrodes, is studied with the use of a time dependent one-dimensional particle-in-cell Monte-Carlo collisions model. This plasma consists of only positively and negatively singly charged ions with the same order of mass and temperature (the electron density is zero). The right electrode is grounded, and the left electrode is biased with a voltage waveform varying from sinusoidal to square with the frequency in the kHz to MHz range. The sheath evolution and the particle flux towards the electrodes, as a function of both space and time, are investigated for the various waveforms and frequencies. The sheath evolution has a strong influence on the time averaged ion energy distribution function (IEDF). The IEDF is broad with a low energy tail for low frequency sinusoidal biases (25 kHz) while peaked at low energy for higher frequencies (2 MHz). For square waveforms, the IEDF is mono-energetic with some broadening when the rise time is faster than the typical time to establish the steady state sheath formation (<0.3 μs).
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