Abstract
This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using three droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates a body force. The dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. The tilting platform enabled an angular coverage up to 0.9° (±0.02°), with a maximum displacement of 120 µm. The tilting micromirror platform has beam steering characteristics suitable for various optical applications. The actuating platform sensor is a cost-effective and simple alternative method to study liquid dielectrophoresis without measuring the droplet contact angle. Furthermore, the unique configuration without any solid-solid contact offers a potential improvement for applications in optics, actuators, and other conventional microelectromechanical systems.
Highlights
Controlled tilting mirrors play an important role in several modern technologies
Testing results were measured using a contact angle goniometer, and they show that higher voltages generate a stronger electric field and, Conventional beam steering designs, for example piezoelectric actuators, are based on solid parts whose structures are rigid, and limited by the stiction effect of moving parts [39]
Con trolling the contact angle of droplets situated under a mirror plate provided a three-axis tilt mechanism for beam steering
Summary
Controlled tilting mirrors play an important role in several modern technologies They are typically found in many re lated research fields, including microscopy, micromachining, mi cropositioning, and lithography [1,2]. The application of a micromirror can be found in optical devices [3,4], tuneable lasers [5], 3D scanning using light detection and ranging (LIDAR) [6], and imaging technologies [7]. They are compact and light weight, presenting a ubiquitous solution for beam steering [8]. The technology has been steadily growing, and the recent developments are focusing on affordability, high-speed motion, and a wide field of view [10]
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