Abstract

A graphite probe with Ti films (60 nm) was exposed to the scrape-off plasma of JIPP T-IIU to study surface effects by edge plasma. The surface and in-depth profile of the surface region were analyzed by RBS, PIXE, XPS and AES after 4 plasma discharges. Surface sputtering, deposition of impurities and surface modification were found to occur simultaneously during plasma discharges. About a half amount of pre-evaporated Ti was lost due to sputting, while the amount of deposited metallic impurities was maximum at the surface facing the ion drift side. The sputtering and deposition were not very significant, while the surface modification to form TiC was enhanced significantly at the surface facing the electron drift side.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.