Abstract
Detecting multiple ions and solutes in human body is important to medical examinations of patients. In this study, Ti-doped InGaO (IGO) electrolyte–insulator–semiconductor (EIS) biosensors were fabricated for multiple ion and solute sensing capability. To optimize the sensing performance, rapid thermal annealing could enhance up to 70% hydrogen ion sensitivity and more than 50% multiple ion and solute sensitivity compared with the as-deposited sample owing to improvement of material quality. Ti-doped IGO EIS multianalyte biosensors show promise for future portable biosensing applications.
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