Abstract
The terahertz (THz) spectroscopy of ion-implanted layers was investigated. First, MgO(001) single crystals were implanted with 3MeV gold ions at an ion fluence of 1×1016cm−2, and annealed in air at 700K for 1h, and again at 1100K for 1h. Then, the reflectance spectrum ranging from 200 to 700cm−1, and transmittance spectrum ranging from 200 to 1500nm were measured. Results showed that the MgO had a high reflectance (≃1) region from 400 to 500cm−1. The ion-implantation reduced this reflectance to 0.9, and the annealing process restored it. Analysis of the reflectance spectra yielded the oscillation parameters of the optical phonon modes of MgO. The ion-implantation increased the damping constant of the phonon mode at 400cm−1 from 1.31 to 18.9cm−1, whereas the annealing process reduced it to 8.2cm−1. The absorption peak at 580nm due to the ion-implantation was reduced by the annealing process.
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