Throughput-driven condition-based maintenance for frequently reconfigured mass production equipment

Abstract

Heavily utilised reconfigurable production equipment has uneven deterioration rate caused by frequently changing configurations and complex subsystem interaction. Thus, traditional maintenance approaches that rely on reliability modelling are ineffective when applied on this class of equipment. This paper introduces a throughput-driven condition-based maintenance framework intended to perform predictive maintenance for heavily utilised reconfigurable production equipments. The effectiveness of the proposed method is experimentally validated using actual production records of the semiconductor test handlers. The primary benefit of the proposed framework is its prediction efficacy while accounting for the complex subsystem interaction through Bayesian statistics. It is low cost to implement because it only uses existing resources already available in most manufacturing plants.