Abstract
The dissociative ionization process of BrCN was studied using the threshold ionization mass spectrometry. The threshold of the production of C+ was determined as 23.3±1.0 eV. From the discussion based on this result, the low (≤0.2) concentration of the N atoms in the amorphous carbon nitride films formed from the dissociative excitation reaction of BrCN with the electron cyclotron resonance plasma of Ar was considered to originate in the effective production of C and C+ by the impact of high-energy electrons.
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