Abstract
Speckle interferometry is one of the important measurement methods of deformation on an object with rough surfaces. In this paper, a method which can be applied to a three-dimensional (3-D) shape measurement for dynamic events is proposed. In the method, the differential coefficient distribution of the shape of such an object is detected by giving a known lateral shift in the computer memory in order to analyze using one-shot speckle pattern. The 3-D shape can be reconstructed by integrating the differential coefficient distribution. The method is also applied to the 3-D shape measurement of superfine structure beyond the diffraction limit. Furthermore, the influence of magnitude of lateral shift on shape is discussed.
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