Abstract
We present an analysis of mixed convection in an idealized cold-wall horizontal chemical vapor deposition (CVD) reactor with a tapered susceptor. The analysis is based on the full three-dimensional elliptic form of the conservation equations. The predictions of fluid flow and heat transfer are made by solving the conservation equations for a single species and the details of chemistry and species transport are not included. Thus, the results are valid for CVD applications in which the reactants are present in very small concentrations in the inert carrier gas
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