Abstract
We have developed a photocurable PDMS resin for making three-dimensional (3-D) PDMS-based micro structures via two-photon microstereolithography. Several 3-D micro structures such as alphabetical letters and microrotors were fabricated using femtosecond laser direct writing. Freely movable micro structures were also fabricated using the direct writing process. In addition, a microrotor was rotated by optical trapping. Finally, a movable microrotor was built into a microchannel and driven by light. Movable PMDS micromachines such as these have potential for application to microfluidic devices and as micromanipulation tools for biological applications
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