Abstract
Three-dimensional microstructures made of Ni metal or acrylic resin were fabricated by five sequential processes: porous anodic oxide film formation, pore sealing, laser irradiation, Ni electroplating or electrophoretic deposition of acrylic resin, and removal of the aluminum substrate and anodic oxide films. Cylindrical and prismatic aluminum rods were anodized in an oxalic acid solution to form porous-type anodic oxide films, and then immersed in boiling distilled water for pore sealing. The anodized and pore-sealed specimens were irradiated with a pulsed neodymium-doped yttrium aluminum garnet (Nd-YAG) laser beam in a Ni plating solution or doubly distilled water to remove anodic oxide film locally by rotating and moving up/down with an XYZθ stage. Nickel or acrylic resin was deposited at the area where film had been removed by cathodic or anodic polarization in the solution before removing the aluminum substrate and anodic oxide films in NaOH solutions. Cylindrical and prismatic network cages, rings, springs, and bellows made of Ni metal or acrylic acid resin were fabricated successfully. © 2003 The Electrochemical Society. All rights reserved.
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