Abstract
In this paper, the pumping performances of a piezoelectric valveless micropump areinvestigated in terms of the three-dimensional electro-fluid–structural interaction. Avalveless micropump that was developed in previous work is composed of a four-layerlightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber andtwo diffusers. The solution of micropump simulations can be divided into a structuraldomain and a fluid domain. ANSYS and ANSYS CFX are used for the structural and fluiddomains, respectively. Both the structural and fluid domains are coupled in thethree-dimensional simulation.The present method is validated by comparing the calculated pumping performance withthe previous experimental results. We found that the resonant driven frequencyof the micropump is 220 Hz, which is close to the experimental value of 200 Hz.The maximum difference of the net flow rate between the simulation and theexperiment is around 30%. The difference can be explained in terms of a featuremodeling limitation of the nozzle–diffuser element. The characteristics of the valvelessmicropump are also investigated in relation to the effects of the driven frequency.
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