Three-dimensional CZ silicon melt flow under induction heating

Abstract

Temperature distribution along the crucible wall is seriously affected by the relative position of the crucible against the induction coil. In this study, the effect of temperature distribution along the crucible vertical wall on CZ silicon melt flow has been investigated numerically by using three-dimensional flow simulation code. The temperature distribution along the crucible vertical wall is assumed in three cases, linearly increased from bottom to top, flat distribution and linearly decreased from bottom to top, respectively, while the temperature distribution along the crucible bottom wall maintains the same distribution in every case. If the crucible vertical wall temperature is increased from bottom to top, the melt flow becomes completely unstable; the flow structure becomes fully three-dimensional and time dependent. If the temperature is decreased from bottom to top, the flow structure becomes almost axisymmetric and steady state; however, small three-dimensional temperature fluctuation is observed.